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    分类
    
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行业应用与解决方案
资源与工具
联系

简体中文

定制平台分类

XYT晶圆测试平台

*如需详细参数，请联系雅科贝思销售工程师（邮箱：cust-service@akribis-sys.cn）

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产品概述

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产品特性

01
XY中空设计，Class100

XY中空设计，Class100
02
XY十字叠加结构，内置直线电机及高精度交叉滚柱导轨

XY十字叠加结构，内置直线电机及高精度交叉滚柱导轨
03
XY集成高精度光栅尺，重复定位精度±0.5um，绝对定位精度2μm

XY集成高精度光栅尺，重复定位精度±0.5um，绝对定位精度2μm
04
T轴为高精度力矩电机，轴向/径向端跳＜3um，360度旋转

T轴为高精度力矩电机，轴向/径向端跳＜3um，360度旋转
05
典型应用领域：4/6/8寸晶圆检测/测试

典型应用领域：4/6/8寸晶圆检测/测试

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SHOW FULL COLUMNS FROM `cn_cms_column_customs` [ RunTime:0.001175s ]
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SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 41 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001783s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 11 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001999s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 12 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.002202s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 13 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001867s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 241 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.002548s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 15 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001485s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 17 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001452s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 19 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001297s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 20 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001808s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 18 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001192s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 21 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001245s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 22 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001370s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 23 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001749s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 31 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001753s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 32 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001673s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 7 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.002934s ]
SHOW FULL COLUMNS FROM `cn_web_medium_links` [ RunTime:0.002440s ]
SELECT * FROM `cn_web_medium_links` WHERE `status` = 1 ORDER BY `listorder` DESC [ RunTime:0.000693s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 7 AND `status` = 1 AND ( FIND_IN_SET(2, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001627s ]

XYT晶圆测试平台

产品特性

XY中空设计，Class100

XY中空设计，Class100

XY十字叠加结构，内置直线电机及高精度交叉滚柱导轨

XY十字叠加结构，内置直线电机及高精度交叉滚柱导轨

XY集成高精度光栅尺，重复定位精度±0.5um，绝对定位精度2μm

XY集成高精度光栅尺，重复定位精度±0.5um，绝对定位精度2μm

T轴为高精度力矩电机，轴向/径向端跳＜3um，360度旋转

T轴为高精度力矩电机，轴向/径向端跳＜3um，360度旋转

典型应用领域：4/6/8寸晶圆检测/测试

典型应用领域：4/6/8寸晶圆检测/测试

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