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简体中文

定制平台分类

6轴迷你平台用于光学调平定位

*如需详细参数，请联系雅科贝思销售工程师（邮箱：cust-service@akribis-sys.cn）

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产品特性

01
XY为超薄直线电机，内置光栅尺，重复定位精度＜1μm

XY为超薄直线电机，内置光栅尺，重复定位精度＜1μm
02
Theta轴为直驱力矩电机，角度调整，内置光栅尺

Theta轴为直驱力矩电机，角度调整，内置光栅尺
03
最上端为3个Z轴音圈电机，特殊算法，内置光栅尺，可以实现上下调焦及超高精度调平

最上端为3个Z轴音圈电机，特殊算法，内置光栅尺，可以实现上下调焦及超高精度调平
04
典型应用领域：电子元器件精密装配/检测、晶圆检测

典型应用领域：电子元器件精密装配/检测、晶圆检测

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SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 41 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001128s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 11 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001303s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 12 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001206s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 13 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001172s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 241 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001634s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 15 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001351s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 17 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001269s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 19 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001747s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 20 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001490s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 18 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001416s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 21 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001150s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 22 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001363s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 23 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001829s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 31 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001491s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 32 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.002089s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 7 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.002362s ]
SELECT * FROM `cn_cms_column` WHERE `id` = 174 LIMIT 1 [ RunTime:0.001953s ]
SHOW FULL COLUMNS FROM `cn_web_medium_links` [ RunTime:0.001645s ]
SELECT * FROM `cn_web_medium_links` WHERE `status` = 1 ORDER BY `listorder` DESC [ RunTime:0.001810s ]
SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 7 AND `status` = 1 AND ( FIND_IN_SET(2, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.001511s ]

6轴迷你平台用于光学调平定位

产品特性

XY为超薄直线电机，内置光栅尺，重复定位精度＜1μm

XY为超薄直线电机，内置光栅尺，重复定位精度＜1μm

Theta轴为直驱力矩电机，角度调整，内置光栅尺

Theta轴为直驱力矩电机，角度调整，内置光栅尺

最上端为3个Z轴音圈电机，特殊算法，内置光栅尺，可以实现上下调焦及超高精度调平

最上端为3个Z轴音圈电机，特殊算法，内置光栅尺，可以实现上下调焦及超高精度调平

典型应用领域：电子元器件精密装配/检测、晶圆检测

典型应用领域：电子元器件精密装配/检测、晶圆检测

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